Annapoorani Sundaramoorthi
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Thin films, Lithography, Polymers, Glasses, Interfaces, Photoresist materials, Thermal modeling, Systems modeling, Polymer thin films, Temperature metrology

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