Dr. Anne-Claire Salaün
Researcher at Univ de Rennes I
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Thin films, Sensors, Glasses, Germanium, Silicon, Silicon films, Humidity, Bridges, Transistors, Field effect transistors

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Etching, Electrodes, Germanium, Ions, Silicon, Bridges, Photomasks, Boron, Low pressure chemical vapor deposition, Field effect transistors

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Oxides, Etching, Annealing, Germanium, Silicon, Oxygen, Scanning electron microscopy, Bridges, Low pressure chemical vapor deposition, Transistors

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