Dr. Anne-Sophie Morlens
at Ecole Nationale Supérieure de Techniques Avancées
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | October 12, 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Mirrors, Spatial filters, Interferometers, Spectroscopy, X-rays, Wavefronts, Amplifiers, Spatial coherence, X-ray lasers, Visibility

PROCEEDINGS ARTICLE | October 1, 2007
Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II
KEYWORDS: Monochromatic aberrations, X-ray optics, Sensors, Calibration, Argon, X-rays, Wavefronts, Infrared radiation, Extreme ultraviolet, High harmonic generation

PROCEEDINGS ARTICLE | September 20, 2007
Proc. SPIE. 6705, Advances in X-Ray/EUV Optics and Components II
KEYWORDS: Mirrors, Multilayers, Holograms, Holography, Digital holography, Microscopy, X-rays, Silicon, Reflectivity, Extreme ultraviolet

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Mirrors, Multilayers, Calibration, Silicon, Reflectivity, Control systems, Reflectometry, Extreme ultraviolet, Neon, Molybdenum

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Wafer-level optics, Reticles, Printing, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers, Fiber optic illuminators

PROCEEDINGS ARTICLE | December 19, 2003
Proc. SPIE. 5197, Soft X-Ray Lasers and Applications V
KEYWORDS: Mirrors, X-ray optics, Interferometers, Wavefront sensors, Wavefronts, Extreme ultraviolet, Picosecond phenomena, X-ray lasers, Plasma, Michelson interferometers

Showing 5 of 6 publications
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