Dr. Anne-Sophie Morlens
at Ecole Nationale Supérieure de Techniques Avancées
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 12 October 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Mirrors, Spatial filters, Interferometers, Spectroscopy, X-rays, Wavefronts, Amplifiers, Spatial coherence, X-ray lasers, Visibility

Proceedings Article | 1 October 2007
Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II
KEYWORDS: Monochromatic aberrations, X-ray optics, Sensors, Calibration, Argon, X-rays, Wavefronts, Infrared radiation, Extreme ultraviolet, High harmonic generation

Proceedings Article | 20 September 2007
Proc. SPIE. 6705, Advances in X-Ray/EUV Optics and Components II
KEYWORDS: Mirrors, Multilayers, Holograms, Holography, Digital holography, Microscopy, X-rays, Silicon, Reflectivity, Extreme ultraviolet

Proceedings Article | 5 October 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Mirrors, Multilayers, Calibration, Silicon, Reflectivity, Control systems, Reflectometry, Extreme ultraviolet, Neon, Molybdenum

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Wafer-level optics, Reticles, Printing, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers, Fiber optic illuminators

Showing 5 of 6 publications
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