Annemarie MacKenzie
at Infineon Technologies AG
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Databases, Inspection, Scanning electron microscopy, Photomask technology

PROCEEDINGS ARTICLE | May 28, 2003
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Human-machine interfaces, Databases, Manufacturing, Inspection, Data processing, Photomasks, Semiconducting wafers, Yield improvement, Data analysis, Defect inspection

PROCEEDINGS ARTICLE | August 16, 2002
Proc. SPIE. 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Reticles, Databases, Etching, Dry etching, Particles, Laser applications, Inspection, Chromium, Scanning electron microscopy, Photomasks

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