Ms. Annie Xia
Applications Engineer at Entegris Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Molecular bridges, Metals, Particles, Scanning electron microscopy, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Semiconducting wafers

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