Dr. Anthony M. Keen
Technology Manager - EUV at Edwards Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 8, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Semiconductors, Lithography, Optical lithography, Nitrogen, Manufacturing, Semiconductor manufacturing, Extreme ultraviolet lithography, Data centers, Semiconducting wafers, Vacuum equipment

PROCEEDINGS ARTICLE | April 4, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Mirrors, Contamination, Calibration, Molecules, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Analytical research, EUV optics

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Carbon, Lithography, Mirrors, Contamination, Metals, Silicon, Projection systems, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

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