Dr. Anton N. Boyko
at MIET
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Detection and tracking algorithms, Etching, Metals, Silicon, Scanning electron microscopy, Solids, Adsorption, Fractal analysis, Wet etching, Thermodynamics

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Microelectromechanical systems, Switching, Resonators, Electrodes, Silicon, Capacitance, Transducers, Signal processing, Data conversion, Oscilloscopes

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