Anton Haase
at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (7)

Proceedings Article | 24 March 2017 Paper
Victor Soltwisch, Christian Laubis, Analía Fernández Herrero, Mika Pflüger, Anton Haase, Frank Scholze
Proceedings Volume 10143, 101430P (2017)
KEYWORDS: Scatterometry, Metrology, Extreme ultraviolet, X-rays, Grazing incidence, Scattering, Extreme ultraviolet lithography, High volume manufacturing, Process control, X-ray characterization, Diffraction, Diffraction gratings, Laser scattering, Monte Carlo methods

Proceedings Article | 18 March 2016 Paper
Christian Laubis, Annett Barboutis, Christian Buchholz, Andreas Fischer, Anton Haase, Florian Knorr, Heiko Mentzel, Jana Puls, Anja Schönstedt, Michael Sintschuk, Victor Soltwisch, Christian Stadelhoff, Frank Scholze
Proceedings Volume 9776, 977627 (2016)
KEYWORDS: Extreme ultraviolet, Metrology, Extreme ultraviolet lithography, Radiometry, Reflectometry, Pellicles, Lifetime testing equipment, Mirrors, Optical filters, Spatial filters, Protactinium, Sensors

Proceedings Article | 24 September 2015 Paper
Anton Haase, Victor Soltwisch, Frank Scholze, Stefan Braun
Proceedings Volume 9628, 962804 (2015)
KEYWORDS: Scattering, Interfaces, Molybdenum, Extreme ultraviolet, Mirrors, Crystals, Laser scattering, Light scattering, Sensors, Reflectivity

Proceedings Article | 4 September 2015 Paper
Proceedings Volume 9661, 96610W (2015)
KEYWORDS: Extreme ultraviolet, Polarization, Reflectivity, Data modeling, Reticles, Mirrors, Diffraction, EUV optics, Extreme ultraviolet lithography, Photomasks

Proceedings Article | 17 October 2014 Paper
F. Scholze, B. Bodermann, S. Burger, J. Endres, A. Haase, M. Krumrey, C. Laubis, V. Soltwisch, A. Ullrich, J. Wernecke
Proceedings Volume 9231, 92310M (2014)
KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Scatterometry, Diffraction, X-rays, Diffraction gratings, Scattering, Photomasks, Polarization, Finite element methods

Showing 5 of 7 publications
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