Mr. Anton Melnikov Profile

Anton Melnikov

at Fraunhofer Institute for Photonic Microsystem IPMS

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Publications (1)

Proceedings Article | 28 February 2020 Paper

Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation

Anton Melnikov, Hermann A. G. Schenk, Franziska Wall, Barbara Spitz, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Harald Schenk

Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX

KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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