Anton Melnikov
at Fraunhofer Institute for Photonic Microsystem IPMS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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