Antonela Comisso
at Univ degli Studi di Padova
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 14 September 2016
OE Vol. 55 Issue 09
KEYWORDS: Titanium dioxide, Reflectivity, Titanium, Thin films, Silicon, X-rays, Statistical modeling, Contamination, Interfaces, Extreme ultraviolet

Proceedings Article | 12 May 2015
Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV
KEYWORDS: Thin films, Reflectivity, Extreme ultraviolet, X-rays, Surface roughness, Titanium, Refractive index, Silicon, X-ray optics, Titanium dioxide

Proceedings Article | 12 May 2015
Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV
KEYWORDS: Reflectivity, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Boron, Multilayers, Interfaces, X-rays, Diffusion, Grazing incidence

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