Antonio Luque
at Univ de Sevilla
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Silicon, Semiconducting wafers, Liquids, Microfluidics, Oxides, Particles, Microsystems, Prototyping, Etching, Wafer bonding

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