Dr. Apoorva Oak
at imec
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Oxides, Lithography, Optical lithography, Metals, Scanners, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Analytics, Modeling, Data modeling, Computer simulations, Neural networks, Machine learning, Optical proximity correction, Process modeling

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Lithography, Metals, Extreme ultraviolet, Optical proximity correction, SRAF, Semiconducting wafers

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