Aram Kazarian
at Synopsys Inc
SPIE Involvement:
Publications (7)

Proceedings Article | 28 September 2017 Paper
Kevin Hooker, Bernd Kuechler, Aram Kazarian, Guangming Xiao, Kevin Lucas
Proceedings Volume 10446, 1044604 (2017)
KEYWORDS: Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Photomasks, Optical lithography, Optical proximity correction, Resolution enhancement technologies

Proceedings Article | 24 March 2017 Presentation + Paper
Proceedings Volume 10143, 101431C (2017)
KEYWORDS: Extreme ultraviolet, Optical lithography, Extreme ultraviolet lithography, Photomasks, Optical proximity correction, Resolution enhancement technologies, Reticles, SRAF, Semiconducting wafers, Lithography, Critical dimension metrology, Manufacturing, Atrial fibrillation

Proceedings Article | 13 March 2012 Paper
Xin Zheng, Jensheng Huang, Fook Chin, Aram Kazarian, Chun-Chieh Kuo
Proceedings Volume 8326, 83261C (2012)
KEYWORDS: 3D modeling, Optical proximity correction, Calibration, Data modeling, Scanning electron microscopy, Mathematical modeling, Photoresist materials, Optical lithography, Photomasks, Lithography

Proceedings Article | 4 March 2010 Paper
Proceedings Volume 7640, 76402Q (2010)
KEYWORDS: Etching, Data modeling, Lithography, Optical proximity correction, Calibration, Inspection, Performance modeling, Optical lithography, Semiconducting wafers, Process modeling

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 727435 (2009)
KEYWORDS: Optical proximity correction, Chemically amplified resists, Calibration, Data modeling, Diffusion, Semiconducting wafers, Image enhancement, Optical resolution, Optical lithography, Image analysis

Showing 5 of 7 publications
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