Dr. Ndeye Arame Thiam
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Etching, Silicon, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Information technology, Critical dimension metrology

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Etching, Metals, Silicon, Resistance, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, System on a chip

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