Dr. Archita Sengupta
Technologist at Intel Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 29, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Chemical species, Photons, Transducers, Photomasks, Cavitation, Acoustics, Semiconducting wafers, Liquids, Sonoluminescence, Acoustic cavitation

PROCEEDINGS ARTICLE | June 28, 2005
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Carbon, Lithography, Reticles, Defect detection, Crystals, Manufacturing, Pellicles, Photomasks, Critical dimension metrology, Semiconducting wafers

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