Dr. Archita Sengupta Profile

Dr. Archita Sengupta

Sr. Technologist at Intel Corp

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Publications (2)

Proceedings Article | 29 March 2007 Paper

Experimental and simulation investigations of acoustic cavitation in megasonic cleaning

Krishna Muralidharan, Manish Keswani, Hrishikesh Shende, Pierre Deymier, Srini Raghavan, Florence Eschbach, Archita Sengupta

Proceedings Volume 6517, 65171E (2007) https://doi.org/10.1117/12.712464

KEYWORDS: Acoustics, Cavitation, Acoustic cavitation, Transducers, Liquids, Chemical species, Semiconducting wafers, Sonoluminescence, Photons, Photomasks

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Proceedings Article | 28 June 2005 Paper

Photomask lifetime issues in ArF lithography

Florence Eschbach, Peter Coon, Barbara Greenebaum, Anurag Mittal, Peter Sanchez, Daniel Tanzil, Grace Ng, Henry Yun, Archita Sengupta

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617078

KEYWORDS: Pellicles, Photomasks, Semiconducting wafers, Reticles, Crystals, Lithography, Critical dimension metrology, Defect detection, Manufacturing, Carbon

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