Dr. Ardavan Zandiatashbar
Senior Applications Scientist at Park Systems Inc.
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Polishing, Metrology, Imaging systems, Scanners, Surface roughness, Atomic force microscopy, Profiling, Semiconducting wafers, Enhanced vision, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Etching, Crystals, Silicon, Light scattering, Inspection, Atomic force microscopy, Scanning electron microscopy, Optical alignment, Semiconducting wafers, Enhanced vision

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Reticles, Scanners, Inspection, Nondestructive evaluation, Electron microscopes, Atomic force microscopy, Photomasks, Extreme ultraviolet, Atomic force microscope, Enhanced vision

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Scanners, Inspection, Image resolution, Nondestructive evaluation, Atomic force microscopy, Atomic force microscope, Optical alignment, Semiconducting wafers, Enhanced vision

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top