Dr. Ardavan Zandiatashbar
Principal Engineer at Western Digital Corp.
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Polishing, Metrology, Imaging systems, Scanners, Surface roughness, Atomic force microscopy, Profiling, Semiconducting wafers, Enhanced vision, Chemical mechanical planarization

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Etching, Crystals, Silicon, Light scattering, Inspection, Atomic force microscopy, Scanning electron microscopy, Optical alignment, Semiconducting wafers, Enhanced vision

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Reticles, Scanners, Inspection, Nondestructive evaluation, Electron microscopes, Atomic force microscopy, Photomasks, Extreme ultraviolet, Atomic force microscope, Enhanced vision

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Scanners, Inspection, Image resolution, Nondestructive evaluation, Atomic force microscopy, Atomic force microscope, Optical alignment, Semiconducting wafers, Enhanced vision

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