Arief B. Suriadi
R&D Engineer
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Microelectromechanical systems, Reticles, Optical lithography, Etching, Metals, Ultraviolet radiation, Silicon, Photoresist materials, Photomasks, Semiconducting wafers

Proceedings Article | 26 April 2001
Proc. SPIE. 4404, Lithography for Semiconductor Manufacturing II
KEYWORDS: Optical lithography, Etching, Metals, Silicon, Coating, Photoresist materials, Thin film coatings, Semiconducting wafers, Anisotropic etching, Photoresist developing

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