Dr. Arjun Singh
Principal Engineer at imec
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 28 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Wafer-level optics, Optical lithography, Etching, Image processing, Scanners, Photomasks, Directed self assembly, Optical alignment, Semiconducting wafers

Proceedings Article | 24 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Data modeling, Image processing, Image analysis, Scanning electron microscopy, Process control, Software development, Algorithm development, Data analysis

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymethylmethacrylate, Cadmium, Materials processing, Manufacturing, Photoresist materials, Process control, Directed self assembly, Plasma etching, Critical dimension metrology, Polymer thin films

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Optical lithography, Etching, Image processing, Silicon, Scanning electron microscopy, Photomasks, Directed self assembly, Optical alignment, Semiconducting wafers, System on a chip

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymethylmethacrylate, Etching, Photoresist materials, Directed self assembly, Plasma etching, Extreme ultraviolet lithography, Plasma

Showing 5 of 10 publications
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