Arnaud F. Bazin
at CEA-LETI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Ellipsometry, FT-IR spectroscopy, Etching, Argon, Polymers, Resistance, Photoresist materials, Photoresist processing, Plasma treatment, Plasma

Proceedings Article | 12 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: FT-IR spectroscopy, Etching, Argon, Dry etching, Polymers, Chemistry, Resistance, Photoresist materials, Chemical analysis, Plasma

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top