Dr. Arne Schleunitz
at micro resist technology GmbH
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Holograms, Etching, Polymers, Silicon, Scanning probe lithography, Atomic force microscopy, Nanoimprint lithography, Reactive ion etching, Photoresist processing

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10109, Optical Interconnects XVII
KEYWORDS: Wafer-level optics, Lithography, Waveguides, Polymers, Ultraviolet radiation, 3D printing, Micro optics, Integrated optics, Optical interconnects, Optics manufacturing, Prototyping, Absorption

SPIE Journal Paper | August 7, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Nanoimprint lithography, Integrated optics, Semiconducting wafers, Holograms, Etching, Electron beam lithography, Information operations, Waveguides, Oxygen, Spectroscopes

PROCEEDINGS ARTICLE | April 3, 2015
Proc. SPIE. 9368, Optical Interconnects XV
KEYWORDS: Optical components, Lithography, Waveguides, Polymers, Ultraviolet radiation, Manufacturing, Microlens, Nanoimprint lithography, Optical interconnects, Optics manufacturing

SPIE Journal Paper | October 21, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Nanoimprint lithography, Etching, Silicon, Dry etching, Polymers, Photoresist processing, Nickel, Inkjet technology, Nanostructures, Reactive ion etching

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Nanostructures, Refractive index, Etching, Dry etching, Silicon, Surface roughness, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Positron emission tomography

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top