Dr. Arne Schleunitz
at micro resist technology GmbH
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Holograms, Etching, Polymers, Silicon, Scanning probe lithography, Atomic force microscopy, Nanoimprint lithography, Reactive ion etching, Photoresist processing

Proceedings Article | 20 February 2017
Proc. SPIE. 10109, Optical Interconnects XVII
KEYWORDS: Wafer-level optics, Lithography, Waveguides, Polymers, Ultraviolet radiation, 3D printing, Micro optics, Integrated optics, Optical interconnects, Optics manufacturing, Prototyping, Absorption

SPIE Journal Paper | 7 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Nanoimprint lithography, Integrated optics, Semiconducting wafers, Holograms, Etching, Electron beam lithography, Information operations, Waveguides, Oxygen, Spectroscopes

Proceedings Article | 3 April 2015
Proc. SPIE. 9368, Optical Interconnects XV
KEYWORDS: Optical components, Lithography, Waveguides, Polymers, Ultraviolet radiation, Manufacturing, Microlens, Nanoimprint lithography, Optical interconnects, Optics manufacturing

SPIE Journal Paper | 21 October 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Nanoimprint lithography, Etching, Silicon, Dry etching, Polymers, Photoresist processing, Nickel, Inkjet technology, Nanostructures, Reactive ion etching

Showing 5 of 9 publications
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