Dr. Aron J. Cepler
Application Scientist at Nova Measuring Instruments Inc
SPIE Involvement:
Author
Publications (18)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Calibration, Scatterometry, Machine learning, Field effect transistors, Epitaxy, High volume manufacturing, Semiconducting wafers, Scatter measurement, Model-based design

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Metrology, Etching, Gallium arsenide, Silicon, Measurement devices, Geometrical optics, X-ray fluorescence spectroscopy, Nanolithography, Fin field effect transitor

PROCEEDINGS ARTICLE | April 12, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Metals, X-rays, Copper, Resistance, Scatterometry, Process control, Machine learning, Semiconducting wafers, Back end of line

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Diffractive optical elements, Etching, Germanium, X-ray diffraction, Gallium arsenide, Silicon, Materials processing, Solids, Semiconducting wafers, X-ray fluorescence spectroscopy

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Thin films, Metrology, Diffractive optical elements, Etching, Chemical species, Dielectrics, Transmission electron microscopy, Scatterometry, Solids, 3D metrology, Process control, Photomasks, Semiconducting wafers, Thin film devices, Channel projecting optics

SPIE Journal Paper | October 25, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Scatterometry, Critical dimension metrology, Finite element methods, Scatter measurement, Diffractive optical elements, Transmission electron microscopy, Reactive ion etching

Showing 5 of 18 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top