Dr. Aron J. Cepler
Application Scientist at Nova Measuring Instruments Inc
SPIE Involvement:
Author
Publications (16)

PROCEEDINGS ARTICLE | April 12, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Metals, X-rays, Copper, Resistance, Scatterometry, Process control, Machine learning, Semiconducting wafers, Back end of line

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Diffractive optical elements, Etching, Germanium, X-ray diffraction, Gallium arsenide, Silicon, Materials processing, Solids, Semiconducting wafers, X-ray fluorescence spectroscopy

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Thin films, Metrology, Diffractive optical elements, Etching, Chemical species, Dielectrics, Transmission electron microscopy, Scatterometry, Solids, 3D metrology, Process control, Photomasks, Semiconducting wafers, Thin film devices, Channel projecting optics

SPIE Journal Paper | October 25, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Scatterometry, Critical dimension metrology, Finite element methods, Scatter measurement, Diffractive optical elements, Transmission electron microscopy, Reactive ion etching

PROCEEDINGS ARTICLE | March 30, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Optical lithography, Diffractive optical elements, Etching, Transmission electron microscopy, Scatterometry, Process control, Critical dimension metrology, Reactive ion etching, Semiconducting wafers

PROCEEDINGS ARTICLE | March 29, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Multilayers, Metrology, Optical lithography, Metals, Germanium, Gallium arsenide, Silicon, Scatterometry, Semiconducting wafers, Nanowires

Showing 5 of 16 publications
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