Dr. Arul Chakkaravarthi Arjunan
at Sinmat Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 30, 2013
Proc. SPIE. 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems
KEYWORDS: Diamond, Polishing, Silica, Particles, Sapphire, Aluminum, Chemical reactions, Abrasives, Surface finishing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | September 30, 2013
Proc. SPIE. 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems
KEYWORDS: Mirrors, Diamond, Polishing, Particles, Chemical vapor deposition, Chemical reactions, Abrasives, Silicon carbide, Surface finishing, Chemical mechanical planarization

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