Dr. Arul Chakkaravarthi Arjunan
at Sinmat Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 30, 2013
Proc. SPIE. 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems
KEYWORDS: Sapphire, Surface finishing, Polishing, Silica, Chemical mechanical planarization, Particles, Chemical reactions, Abrasives, Aluminum, Diamond

PROCEEDINGS ARTICLE | September 30, 2013
Proc. SPIE. 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems
KEYWORDS: Polishing, Silicon carbide, Surface finishing, Mirrors, Particles, Diamond, Abrasives, Chemical reactions, Chemical mechanical planarization, Chemical vapor deposition

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