Dr. Arun Kumar Nallani
Sr. Staff Product Development Engineer
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 15 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Fabrication, Microfluidics, Ferromagnetics, Glasses, Interfaces, Diffusion, Magnetism, Plasma etching, Plasma systems, Liquids

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Optical components, Polymers, Printing, Micro optics, Microlens, Optical alignment, Vertical cavity surface emitting lasers, Semiconducting wafers, Inkjet technology

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymethylmethacrylate, Polymers, Nickel, Scanning electron microscopy, Photoresist materials, Photomicroscopy, Electroplating

Proceedings Article | 16 January 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Microelectromechanical systems, Gold, Etching, Metals, Indium, Resistance, Directed self assembly, Connectors, Semiconducting wafers, Robotic systems

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