Dr. Arunn Narasimhan
Engineer at TEL FSI Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | April 1, 2004
JM3 Vol. 3 Issue 02
KEYWORDS: Semiconducting wafers, 3D modeling, Thermal modeling, Performance modeling, Optical lithography, Thermal analysis, Data modeling, Temperature metrology, Mechanical engineering, Ear

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Optical lithography, Numerical simulations, 3D modeling, Thermal effects, Thermal analysis, Ear, Semiconducting wafers, Performance modeling, Thermal modeling, Temperature metrology

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