Dr. Arunn Narasimhan
Engineer at TEL FSI Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 April 2004
JM3 Vol. 3 Issue 02
KEYWORDS: Semiconducting wafers, 3D modeling, Thermal modeling, Performance modeling, Optical lithography, Thermal analysis, Data modeling, Temperature metrology, Mechanical engineering, Ear

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Semiconducting wafers, 3D modeling, Thermal modeling, Performance modeling, Optical lithography, Numerical simulations, Temperature metrology, Thermal analysis, Ear, Thermal effects

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