Ashkan Behnam
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 February 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Semiconductors, Thin films, Sensors, Resistance, Physics, Computer simulations, Monte Carlo methods, Optoelectronic devices, Single walled carbon nanotubes, Instrument modeling

Proceedings Article | 20 February 2008
Proc. SPIE. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
KEYWORDS: Oxides, Photodetectors, Transparent conducting films, Electrodes, Metals, Interfaces, Silicon, Control systems, Silicon films, Temperature metrology

Proceedings Article | 25 September 2007
Proc. SPIE. 6769, Nanosensing: Materials, Devices, and Systems III
KEYWORDS: Nanosensors, Electron beam lithography, Etching, Electrodes, Composites, Resistance, Computer simulations, Monte Carlo methods, Chlorine, Single walled carbon nanotubes

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