Ashley Tilson
at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 June 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Wafer-level optics, Metrology, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Dysprosium, Line edge roughness, Semiconducting wafers, Overlay metrology, Scanning transmission electron microscopy

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Microscopes, Diffraction, Monochromatic aberrations, Metrology, Visualization, Sensors, Image processing, Image quality, Optical alignment, Scanning transmission electron microscopy

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Image segmentation, Interfaces, Silicon, Image quality, 3D metrology, Process control, Image enhancement, Photomicroscopy, 3D image processing

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