Dr. Ashok Kumar Paul
Senior Assistant Director at Central Scientific Instruments Organisation
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Zinc oxide, Refractive index, Thin films, Gold, Ultraviolet detectors, Ultraviolet radiation, Resistance, Sputter deposition, Semiconductors, UV optics

PROCEEDINGS ARTICLE | April 21, 2003
Proc. SPIE. 5117, VLSI Circuits and Systems
KEYWORDS: Copper, Titanium, Diffusion, Annealing, Metals, Nitrogen, Resistance, Silicon, Tin, Plasma

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Reactive ion etching, Silicon, Microelectromechanical systems, Etching, Fluorine, Microtechnology, Materials processing, Packaging, Chemistry, Argon

PROCEEDINGS ARTICLE | November 9, 1999
Proc. SPIE. 3903, Indo-Russian Workshop on Micromechanical Systems

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