Dr. Ashok Kumar Paul
Senior Assistant Director at Central Scientific Instruments Organisation
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Semiconductors, Gold, Thin films, Refractive index, Sputter deposition, Ultraviolet radiation, Resistance, Zinc oxide, Ultraviolet detectors, UV optics

PROCEEDINGS ARTICLE | April 21, 2003
Proc. SPIE. 5117, VLSI Circuits and Systems
KEYWORDS: Titanium, Metals, Annealing, Copper, Silicon, Diffusion, Nitrogen, Resistance, Plasma, Tin

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Packaging, Etching, Argon, Silicon, Chemistry, Materials processing, Reactive ion etching, Fluorine, Microtechnology

PROCEEDINGS ARTICLE | November 9, 1999
Proc. SPIE. 3903, Indo-Russian Workshop on Micromechanical Systems

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