Dr. Ashwin B. Rao
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 3 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: FT-IR spectroscopy, Optical spheres, Data modeling, Polymers, Spectroscopy, Hydrogen, Photoresist materials, Solids, Line edge roughness, Polymer thin films

Proceedings Article | 22 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Scattering, Polymers, In situ metrology, X-rays, Interfaces, Silicon, Reflectivity, Photoresist materials, Photoresist developing, Standards development

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Quartz, Polymers, Molecules, Crystals, Chemistry, Infrared spectroscopy, Photoresist materials, Photoresist developing, Standards development

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: FT-IR spectroscopy, Scattering, Polymers, Image processing, Diffusion, Reflectivity, Photoresist materials, Image quality, Line edge roughness, Standards development

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top