Askar Rezvanov
Student at Moscow Institute of Physics and Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Mathematical modeling, Chemical species, Molecules, Dielectrics, Silicon, Diffusion, Oxygen, Neodymium, Polarizability, Plasma

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