In this manuscript, a technique to realize multifunctional anisotropic nanoparticles with small size distribution in large quantities is presented. The fabrication of the nanoparticles is based on Ultraviolet Nanoimprint Lithography (UV-NIL), physical vapor deposition and lift-off processes in order to finally disperse the nanoparticles in solution. The particles are designed for in-vitro biomolecular diagnostics. The underlying homogeneous biomolecular sensing method is based on the optical detection of changes in the rotational dynamics of anisotropic hybrid nanoparticles immersed in the sample solution, such as blood. ,  This approach requires highly monodisperse nanoparticles in order to achieve a high sensitivity in molecule detection. The fabrication method based on UV-NIL and lift-off processes holds several advantages compared to chemical synthesized nanoparticles, like very small size variations and engineering freedom in particle geometry. We demonstrate the fabrication of elliptical particles with an area size of 1,557 × 10^(-12)m<sup>2</sup> ±3%.
A novel technique to realize large quantities of stacked multifunctional anisotropic nanoparticles with narrow size distribution is presented. Through the combination of Ultraviolet Nano-Imprint Lithography (UV-NIL), physical vapor deposition and subsequent lift-off processes we fabricate and disperse these particles in solution for the use in biomolecular sensing applications. Compared to chemical nanoparticle synthesis our approach holds several advantages. First, one can control the nanoparticle shape by choosing an appropriate nanopattern for the UV-NIL process. Second, we can choose the composition of the nanoparticles as the materials are deposited layer-wise by sputter deposition. Third, we can fabricate nanoparticles with very small geometrical variations. This is in contrast to chemical synthesis methods where the layer thicknesses and particle size distribution are harder to control.