Aswin Sreedhar
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 April 2010
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Lithography, Databases, Metals, Image segmentation, Error analysis, Monte Carlo methods, Photomasks, Line width roughness, Optical proximity correction, Yield improvement

Proceedings Article | 3 April 2010
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Lithography, Calibration, Metals, Electrons, Manufacturing, Reliability, Resistance, Photomasks, Optical proximity correction, Computer aided design

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