Atoosa Dejkameh
Student at Paul Scherrer Institut
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 30 January 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Extreme ultraviolet, Carbon, Reticles, Inspection, Defect detection, Coherence imaging, Photomasks, Phase measurement, Reflectivity, Microscopes

Proceedings Article | 29 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Reconstruction algorithms, Extreme ultraviolet, Reticles, Phase retrieval, Diffraction, Image quality, Photomasks, Inspection, Error analysis

Proceedings Article | 29 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Diffraction, Extreme ultraviolet, Reflectivity, Sensors, Photomasks, Mirrors, Microscopes, Metrology, Image resolution, Modulation transfer functions

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Photomasks, Extreme ultraviolet, Semiconductors, Inspection, Metrology, Lithography, Mirrors, Particles, Diffraction

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Inspection, Extreme ultraviolet, Reticles, Photomasks, Defect detection, Defect inspection, Phase measurement, Microscopes

Showing 5 of 6 publications
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