Dr. Atsuko Yamaguchi
Chief Researcher at Hitachi Ltd
SPIE Involvement:
Author
Publications (36)

SPIE Journal Paper | 15 June 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Semiconducting wafers, Oxides, Transmission electron microscopy, Etching, Thin films, Ellipsometry, Electron microscopes, Wafer testing, Edge detection, Thin film devices

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Resistance, Inspection, Scanning electron microscopy, Transmission electron microscopy, Capacitance, Field effect transistors, Semiconducting wafers, Nanowires

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Oxides, Metrology, Logic, Statistical analysis, Etching, Germanium, Resistance, Scanning electron microscopy, 3D metrology, Process control, Critical dimension metrology, Algorithm development, Overlay metrology, Standards development, Back end of line

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Edge detection, Metrology, Statistical analysis, Calibration, Etching, Reliability, Resistance, Magnetism, Electron microscopes, Process control, Critical dimension metrology, Semiconducting wafers, Lawrencium

SPIE Journal Paper | 12 October 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Extreme ultraviolet, Scanning electron microscopy, Critical dimension metrology, Electron microscopes, Extreme ultraviolet lithography, Electron beams, Image processing, Double patterning technology, Solids, Precision measurement

Showing 5 of 36 publications
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