Mr. Atsushi Okubo Profile

Atsushi Okubo

at Mitsui Chemicals Inc

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 27 June 2019 Paper

Development of the breathable frame for closed EUV pellicle

Akira Ishikawa, Hirofumi Tanaka, Yosuke Ono, Atsushi Okubo, Kazuo Kohmura

Proceedings Volume 11178, 111780N (2019) https://doi.org/10.1117/12.2533889

KEYWORDS: Pellicles, Polymers, Photomasks, Extreme ultraviolet, Particles, Extreme ultraviolet lithography, Adhesives, Semiconducting wafers, Diffusion, Semiconductor manufacturing

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Proceedings Article | 12 June 2018 Paper

Development of closed-type EUV pellicle

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 10807, 108070I (2018) https://doi.org/10.1117/12.2324819

KEYWORDS: Pellicles, Adhesives, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Contamination

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Proceedings Article | 16 October 2017 Paper

Development of EUV pellicle for suppression of contamination, haze, and outgas generation

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 10451, 104510Q (2017) https://doi.org/10.1117/12.2280595

KEYWORDS: Pellicles, Extreme ultraviolet, Adhesives, Contamination, Extreme ultraviolet lithography, Air contamination, Deep ultraviolet, Stray light, Reflectivity, Diffusion

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Proceedings Article | 26 September 2016 Paper

Development of a novel closed EUV pellicle for EUVL manufacturing

Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako Ishikawa, Tsuneaki Biyajima

Proceedings Volume 9985, 99850B (2016) https://doi.org/10.1117/12.2241393

KEYWORDS: Pellicles, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Manufacturing, Silicon, Particles, Protactinium, Semiconducting wafers, Resistance

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Proceedings Article | 14 April 1999 Paper

Characteristics and reliability of high-power InGaAs/AlGaAs laser diodes with decoupled confinement heterostructure

Yoshikazu Yamada, Atsushi Okubo, Yasuo Oeda, Yumi Yamada, Tsuyoshi Fujimoto, Kiyofumi Muro

Proceedings Volume 3626, (1999) https://doi.org/10.1117/12.345434

KEYWORDS: Semiconductor lasers, Waveguides, Reliability, Heterojunctions, High power lasers, Diodes, Laser optics, Laser development, Pulsed laser operation

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Proceedings Article | 1 April 1999 Paper

High-power InGaAs/AlGaAs laser diodes with decoupled confinement heterostructure

Tsuyoshi Fujimoto, Yumi Yamada, Yoshikazu Yamada, Atsushi Okubo, Yasuo Oeda, Kiyofumi Muro

Proceedings Volume 3628, (1999) https://doi.org/10.1117/12.344544

KEYWORDS: Semiconductor lasers, Waveguides, Resistance, High power lasers, Gallium arsenide, Continuous wave operation, Heterojunctions, Laser development, Cladding, Doping

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Proceedings Article | 4 May 1998 Paper

Characteristics and reliability of high-power GaAs/AlGaAs laser diodes with a decoupled confinement heterostructure

Tsuyoshi Fujimoto, Yoshikazu Yamada, Yasuo Oeda, Atsushi Okubo, Yumi Yamada, Kiyofumi Muro

Proceedings Volume 3285, (1998) https://doi.org/10.1117/12.307594

KEYWORDS: Semiconductor lasers, Heterojunctions, High power lasers, Quantum wells, Waveguides, Aluminum, Continuous wave operation, Gallium arsenide, Diodes, Reliability

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Showing 5 of 7 publications

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