Atsushi Otake
at Mitsubishi Rayon Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Etching, Chemical species, Polymers, Hydrogen, Resistance, Transmittance, Polymerization, Immersion lithography, Line edge roughness

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