Dr. Atsushi Sekiguchi
Vice President at Litho Tech Japan Co Ltd
SPIE Involvement:
Author
Publications (43)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Molecules, Hydrogen, Scanning electron microscopy, Molecular interactions, Photoresist developing, Picture Archiving and Communication System

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Polymers, Scanners, Ions, Silicon, Photography, Manufacturing, Chemical analysis, Chromatography, Liquids, Chemically amplified resists

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Contamination, Nanoparticles, Metals, Particles, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 5 September 2018 Presentation + Paper
Proc. SPIE. 10728, Biosensing and Nanomedicine XI
KEYWORDS: Metamaterials, Nanotechnology, Thin films, Microscopes, Nanostructures, Silicon, Biomimetics, Silicon films, Nanoimprint lithography, Nanolithography

Proceedings Article | 5 September 2018 Paper
Proc. SPIE. 10728, Biosensing and Nanomedicine XI
KEYWORDS: Nanotechnology, Nanoparticles, Polymers, Ultraviolet radiation, Silicon, Manufacturing, Scanning electron microscopy, Printing, Biomimetics, Liquids

Showing 5 of 43 publications
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