Dr. Atsushi Sunahara
at Purdue Univ
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 13 November 2017
Proc. SPIE. 10447, Laser-Induced Damage in Optical Materials 2017
KEYWORDS: Continuous wave operation, Crystals, Excitons, Optical damage, Color centers, Polarons, Absorption

Proceedings Article | 22 February 2017
Proc. SPIE. 10089, Real-time Measurements, Rogue Phenomena, and Single-Shot Applications II
KEYWORDS: Reflectors, Mirrors, Fringe analysis, Doppler effect, Interferometers, Spectroscopy, Laser applications, Imaging spectroscopy, Laser irradiation, Picosecond phenomena, Velocity measurements, Pulsed laser operation

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Light sources, Detection and tracking algorithms, Particles, Plasmas, Physics, Laser irradiation, Laser ablation, Solids, Extreme ultraviolet, Plasma, Liquids, Tin

Proceedings Article | 9 July 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Opacity, Ions, Numerical simulations, Extreme ultraviolet, Optical simulations, Picosecond phenomena, Pulsed laser operation, Tellurium, Plasma, Tin

Proceedings Article | 9 July 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Metrology, Laser energy, Nd:YAG lasers, Inspection, Photomasks, Extreme ultraviolet, Picosecond phenomena, Pulsed laser operation, Plasma, Tin

Showing 5 of 21 publications
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