Atsushi Takahashi
at Keio Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Etching, Silicon, Magnetism, Photomasks, Microfabrication, Reactive ion etching, Computer architecture, Quantum communications, Plasma, Quantum computing

PROCEEDINGS ARTICLE | October 25, 2004
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Actuators, Proteins, Waveguides, Polymers, Ultraviolet radiation, Silicon, Scanning electron microscopy, Stereolithography, Prototyping, 3D microstructuring

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top