An all-silicon quantum computer architecture using <sup>29</sup>Si nuclear spins qubits buried in the spin-free matrix of <sup>28</sup>Si has been suggested. It requires an array of micro-magnets which impose a large magnetic field gradient along the chain of the <sup>29</sup>Si nuclear spins qubits, which allow for the NMR frequency difference between two neighboring <sup>29</sup>Si qubits. In this work, we report on the successful fabrication of an array of NiFe (Ni45%-Fe55%) micro-magnet stripes (the cross-section 1.2x1 μm<sup>2</sup>) formed directly on natural Si wafers using reactive ion etching (RIE) with the NH3-CO-Xe gas mixture. The magnetic field gradient calculation with the finite element method with the geometry of the fabricated NiFe stripes predicts the gradient of 0.4T/μm at the distance 100nm away from the micro-magnet when the stripes are placed in the static magnetic field of 6T for the NMR measurement. The magnetic property of fabricated NiFe stripes was also measured with SQUID, and confirmed that saturation magnetization hadn’t been deteriorated through RIE process.
New concept of micro/nano tools working in water solutuon has been proposed by the author. A real three dimensional micro fabrication process using photo curable polymer named "micro/nano stereolithography" has been also developed by the author's group. The latest version of this process achieved 100 nm in 3D resolution and freely movable micro/nano mechanism are easily fabricated within 20 min. Nano tweezers and nano needle with two degrees of freedom were successfully fabricated without any assembly process. Cell and delicate biological materials can be remotely handled with neither any micro actuators nor lead wire. It was verified that this light-driven micro tool has precise force control with 10 FtN. These light-driven micro tools contribute to cellular biology as well as medical tools.
The second application of microstereolithography is the biochemical IC chips for both micro chemical analysis and synthesis. Unlike conventional "lab. on a chip" and "micro total analysis system" (micro-TAS), our biochemical IC has micro pumps and active valves in one chip. Users can construct their own micro chemical device by themselves. The advanced biochemical IC chip-set for "on chip cell-free protein synthesis" has been prototyped and verified experimentally. A luminous enzyme of fire fly so called "Luciferase" and useful bio-marker protein "GFP" were synthesized successfully. According to above results, the biomchemical IC chips will be useful to "Order-made medicine" in near future.