Dr. Atsushi Takano
at Nagoya University
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Polymers, X-rays, Silicon, Light scattering, Materials processing, Transmission electron microscopy, Polymerization, Directed self assembly, Scatter measurement, Nanolithography

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