Dr. Atul B. Chaudhari
PhD at IMEC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Imaging systems, Polymers, Electrons, Ions, Atomic force microscopy, Scanning electron microscopy, Scanning helium ion microscopy, Photomasks, Picosecond phenomena, Neodymium

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Oxides, Thin films, Nanostructures, Iron, Polymers, Annealing, Silicon, Silicon films, Photomasks, Nanowires

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