Dr. Augustin Jeyakumar
at Intel Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Etching, Polymers, Resistance, Silicon films, Plasma etching, Reactive ion etching, Nanocomposites, Plasma

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Molecules, Silicon, Hydrogen, Coating, Printing, Silicon films, Photomasks

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Etching, Polymers, Silicon, Resistance, Plasma etching, Nanocomposites, Plasma

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Electron beam lithography, Electron beams, Titanium, Silica, Etching, Silicon, Plasmas, Silicon films, Photomasks, Plasma etching

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Electron beam lithography, Electron beams, Titanium, Polymethylmethacrylate, Scattering, Chemical species, Molecules, Silicon, Laser scattering, Monte Carlo methods

Showing 5 of 7 publications
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