Dr. Aurélien Sarrazin
SPIE Involvement:
Publications (11)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 129580K (2024) https://doi.org/10.1117/12.3009969
KEYWORDS: Etching, Plasma etching, Plasma, Climate change, Gases, Transistors, Power consumption, Front end of line, Sustainable technology, CMOS technology

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12956, 129560K (2024) https://doi.org/10.1117/12.3009898
KEYWORDS: Fabrication, 3D microstructuring, Silicon, Deformation, Bending stress, Tin, Microlens, Titanium, Atomic force microscopy

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423
KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12051, 120510Q (2022) https://doi.org/10.1117/12.2614018
KEYWORDS: Reticles, Lithography, Semiconducting wafers, Scanners, Silicon, Overlay metrology, Scanning electron microscopy, Process control, Image processing, Photomasks, Immersion lithography

Proceedings Article | 10 April 2017 Presentation + Paper
S. Landis, H. Teyssedre, G. Claveau, I. Servin, F. Delachat, M. L. Pourteau, A. Gharbi, P. Pimenta Barros, R. Tiron, L. Nouri, N. Possemé, M. May, P. Brianceau, S. Barnola, Y. Blancquaert, J. Pradelles, P. Essomba, A. Bernadac, B. Dal'zotto, S. Bos, M. Argoud, G. Chamiot-Maitral, A. Sarrazin, C. Tallaron, C. Lapeyre, L. Pain
Proceedings Volume 10149, 101490K (2017) https://doi.org/10.1117/12.2259966
KEYWORDS: Directed self assembly, Lithography, Line width roughness, Nanoimprint lithography, Semiconducting wafers, Etching, Electron beam lithography, System on a chip, Critical dimension metrology, Photoresist processing

Showing 5 of 11 publications
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