Dr. Aurélien Tavernier Profile

Dr. Aurélien Tavernier

at CEA

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Understanding plasma etching of grayscale microlenses and multi-height structures for optoelectronic devices

Assia Selmouni, Aurélien Tavernier, Api Warsono, Sébastien Bérard-Bergery, Nicolas Posseme

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010137

KEYWORDS: Plasma etching, Microlens, Optoelectronic devices, Plasma, Etching, Passivation, Deformation, X-ray photoelectron spectroscopy, Vacuum chambers, Surface roughness

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