Austin W. Steinforth
at Univ of Illinois
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV
KEYWORDS: Optical components, Polymethylmethacrylate, Polymers, Lamps, Excimer lasers, Excimers, Photosensitive materials, Vacuum ultraviolet, Clean room processes

Proceedings Article | 10 March 2020 Presentation
Proc. SPIE. 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
KEYWORDS: Optical components, Optical lithography, Cornea, Polymers, Molecules, Plasmas, Lamps, Excimer lasers, Vacuum ultraviolet, Optical microcavities

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