Awad Saad Abou Elkeir
at Hochschule Furtwangen Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Oxides, Capacitors, Silica, Etching, Electrodes, Silicon, 3D modeling, Capacitance, Aluminum, Semiconducting wafers

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